WebFeb 24, 2024 · The Archer 750 overlay metrology system generates accurate and robust measurements of overlay error in the presence of process variation, while achieving … WebThe Archer 200 uses the KLA-Tencor AIM grating alignment mark and is compatible with 10μm 2 μAIM targets as well. Example of overlay error. (Source: KLA-Tencor) Overlay performance good enough for double patterning requires accurate modeling of displacements and distortions, including higher order errors within the field.
KLA-Tencor Archer 10 XT Overlay Metrology, 12
WebSep 5, 2012 · KLA-Tencor Announces New Archer™ 500 Overlay Metrology System Overlay Error Measurements for Development and High Volume Manufacturing of Multiple … WebFeb 22, 2024 · With enhanced productivity, the Archer 600 supports increased sampling of overlay error for improved scanner corrections or identification of inline excursions. Multiple Archer 600 systems are already measuring the most advanced devices at foundry, logic and memory manufacturers worldwide. toy motorized car on today show
Optical inspection machine - Archer™ series - KLA - TENCOR - for ...
WebMar 19, 2015 · Key indicators of overlay measurement quality include: layer coverage, accuracy, TMU, process robustness and robustness to process changes. Measurement … WebJun 22, 2010 · KLA-Tencor Launches the Archer(TM) 300 LCM Overlay Metrology System New System Designed for Cost-Effective In-Line Monitoring and Scanner Qualification for … WebKLA’s software solutions for the semiconductor ecosystem centralize and analyze the data produced by inspection, metrology and process systems, and explore critical-feature designs and manufacturability of patterning technologies. Using advanced data analysis, modeling and visualization capabilities, our comprehensive suite of data analytics products support … toy motorized cars for 6 year old girl